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| Search Results: Conference Papers |
| Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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| Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
| IEICE-EID, IDY, SID-JC, IEIJ-SSL, IEE-EDD |
2025-01-23
13:15 |
Shizuoka |
(Shizuoka) |
[Poster Presentation]
Dependence of the thin film formation of layered BN by low-pressure CVD
Soma Ota, Riki Aoike, Akira Takemura, Hayato Nakano, Takumi Naruse, Ryota Aoyama, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.) |
The effect of growth atmosphere on the formation of BN polytypes was investigated for layered BN films grown on c-plane ... [more] |
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| IEICE-EID, IDY, SID-JC, IEIJ-SSL, IEE-EDD |
2025-01-23
13:20 |
Shizuoka |
(Shizuoka) |
[Poster Presentation]
Mechanism of carbon incorporation to layered BN films grown by low-pressure CVD using BCl3 as a boron source
Ruki Aoike, Soma Ota, Akira Takemura, Hayato Nakano, Ryota Aoyama, Takumi Naruse, Hiroko Kominami, Kazuhiro Hara (Shizuoka Univ.) |
We have been working on low-pressure chemical vapor deposition of hexagonal boron nitride thin films using BCl3 gas as a... [more] |
IDY2025-3
pp.9-12 |
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