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Committee Date Time Place Paper Title / Authors Abstract Paper #
IST, IEICE-ICD, IEICE-SDM 2018-08-07
12:55
Hokkaido Hokkaido University M Bldg. M151 [Invited Talk] Development of SiGe-MEMS-on-CMOS technology for ultra-low-power inertial sensors
Hideyuki Tomizawa, Yoshihiko Kurui (Toshiba), Ippei Akita (AIST), Akira Fujimoto, Tomohiro Saito, Akihiro Kojima, Hideki Shibata (Toshiba)
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