| Paper Abstract and Keywords |
| Presentation |
2025-01-23 13:15
[Poster Presentation]
Dependence of the thin film formation of layered BN by low-pressure CVD
Soma Ota, Riki Aoike, Akira Takemura, Hayato Nakano, Takumi Naruse, Ryota Aoyama, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The effect of growth atmosphere on the formation of BN polytypes was investigated for layered BN films grown on c-plane sapphire substrates by low-pressure CVD using BCl3 and NH3 as sources. Among the ambient gases, r-BN was predominantly formed in the N2 and Ar atmospheres, while a mixture of h-BN and r-BN films was formed in the H2 atmosphere. Based on the relationship between these crystal structures and C impurity concentrations, we discussed the effect of carbon incorporation into the films as a factor promoting the transition from h-BN to r-BN. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Boron nitride / Chemical vapor deposition / Polytype / Cathodoluminescence / / / / |
| Reference Info. |
ITE Tech. Rep. |
| Paper # |
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| Date of Issue |
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| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-EID IDY SID-JC IEIJ-SSL IEE-EDD |
| Conference Date |
2025-01-23 - 2025-01-24 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IEICE-EID |
| Conference Code |
2025-01-EID-IDY-JC-SSL-EDD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Dependence of the thin film formation of layered BN by low-pressure CVD |
| Sub Title (in English) |
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| Keyword(1) |
Boron nitride |
| Keyword(2) |
Chemical vapor deposition |
| Keyword(3) |
Polytype |
| Keyword(4) |
Cathodoluminescence |
| Keyword(5) |
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| Keyword(6) |
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| 1st Author's Name |
Soma Ota |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Riki Aoike |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Akira Takemura |
| 3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name |
Hayato Nakano |
| 4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name |
Takumi Naruse |
| 5th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 6th Author's Name |
Ryota Aoyama |
| 6th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 7th Author's Name |
Hiroko Kominami |
| 7th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 8th Author's Name |
Kazuhiko Hara |
| 8th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2025-01-23 13:15:00 |
| Presentation Time |
5 minutes |
| Registration for |
IEICE-EID |
| Paper # |
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| Volume (vol) |
vol.49 |
| Number (no) |
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| Page |
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| #Pages |
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| Date of Issue |
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