| Paper Abstract and Keywords |
| Presentation |
2023-06-08 15:25
Fabrication of oxide/nitride matrix thin films by pulsed DC reactive sputtering method for realization of Co-based superparamagnetic granular thin films with high magnetization
Takumi Kobayashi, Ryutaro Ono, Genta Egawa, Satoru Yoshimura (Akita Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
In order to realize a Co-based superparamagnetic granular thin film with high magnetization, which can create new magnetic devices such as new functional magnetic sensors capable of detecting zero magnetic fields and omnidirectional magnetic fields, it is necessary to increase the concentration of Co grain with the size of less than 6.9 nm diameter in this thin film. To suppress the grain growth in thin films, in generally, higher deposition rate is effective, and authors already showed that the high speed deposition is effective to suppress the grain growth of Co to the size of less than 6.9 nm diameter in the superparamagnetic granular thin film. In this study, in order to realize the high speed deposition rate of the oxide thin film, which is matrix of Co grains and whose film deposition rate is generally extremely slow, we investigated the film fabrication process using a pulsed DC reactive sputtering method. It was found that an oxide with a stoichiometric composition can be formed at a high deposition rate even at a low oxygen partial pressure of sputtering gas. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Superparamagnetic thin films / Saturation magnetization / Pulsed DC reactive sputtering / High deposition rate / Magnetic sensor / / / |
| Reference Info. |
ITE Tech. Rep., vol. 47, no. 17, MMS2023-35, pp. 1-8, June 2023. |
| Paper # |
MMS2023-35 |
| Date of Issue |
2023-06-01 (MMS) |
| ISSN |
Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-MRIS MMS |
| Conference Date |
2023-06-08 - 2023-06-09 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
RIEC, Tohoku Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Recording system, Head, Media, and Others |
| Paper Information |
| Registration To |
MMS |
| Conference Code |
2023-06-MRIS-MMS |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Fabrication of oxide/nitride matrix thin films by pulsed DC reactive sputtering method for realization of Co-based superparamagnetic granular thin films with high magnetization |
| Sub Title (in English) |
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| Keyword(1) |
Superparamagnetic thin films |
| Keyword(2) |
Saturation magnetization |
| Keyword(3) |
Pulsed DC reactive sputtering |
| Keyword(4) |
High deposition rate |
| Keyword(5) |
Magnetic sensor |
| Keyword(6) |
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| Keyword(7) |
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| 1st Author's Name |
Takumi Kobayashi |
| 1st Author's Affiliation |
Akita University (Akita Univ.) |
| 2nd Author's Name |
Ryutaro Ono |
| 2nd Author's Affiliation |
Akita University (Akita Univ.) |
| 3rd Author's Name |
Genta Egawa |
| 3rd Author's Affiliation |
Akita University (Akita Univ.) |
| 4th Author's Name |
Satoru Yoshimura |
| 4th Author's Affiliation |
Akita University (Akita Univ.) |
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| Speaker |
Author-4 |
| Date Time |
2023-06-08 15:25:00 |
| Presentation Time |
25 minutes |
| Registration for |
MMS |
| Paper # |
MMS2023-35 |
| Volume (vol) |
vol.47 |
| Number (no) |
no.17 |
| Page |
pp.1-8 |
| #Pages |
8 |
| Date of Issue |
2023-06-01 (MMS) |
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