Paper Abstract and Keywords |
Presentation |
2021-10-21 13:40
A 3-Tap Global Shutter 5.0um Pixel with Background Canceling for 165MHz Modulated Pulsed Indirect Time-of-Flight Image Sensor Masafumi Tsutsui, Toshifumi Yokoyama, Takahisa Ogawa, Ikuo Mizuno, Nobuyoshi Takahashi (TPSCo), Cheng Ma (Gpixel INC), Fei Wang (Orbbec Shenzhen), Joris Debondt, Jan Bogaerts (Gpixel NV), Xinyang Wang (Gpixel INC), Assaf Lahav (Tower Semiconductor) |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
3-tap global shutter 5.0um pixel with background canceling for pulsed indirect time-of-flight image sensor has been developed. 2.5um-pitch hybrid bonding is used for stacking sensor and logic wafers. Parasitic light sensitivity of taps is suppressed by 4um-depth backside deep trench isolation, and 6um-thick-epi is used to enhance QE at 940nm wavelength. To enhance pixel response for high modulation frequency of pulsed light, transfer path to each taps is designed to have asymmetric path to minimize transfer length, and electric field in photodiode is carefully designed along vertical and lateral transfer directions. Demodulation contrast of 81% at 165MHz without background canceling is achieved. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
depth sensing / indirect time-of-flight / multi-tap / CMOS image sensor / / / / |
Reference Info. |
ITE Tech. Rep., vol. 45, no. 30, IST2021-56, pp. 33-36, Oct. 2021. |
Paper # |
IST2021-56 |
Date of Issue |
2021-10-14 (IST) |
ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
Download PDF |
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Conference Information |
Committee |
IST |
Conference Date |
2021-10-21 - 2021-10-21 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
|
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Image Sensor , etc. |
Paper Information |
Registration To |
IST |
Conference Code |
2021-10-IST |
Language |
English (Japanese title is available) |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
A 3-Tap Global Shutter 5.0um Pixel with Background Canceling for 165MHz Modulated Pulsed Indirect Time-of-Flight Image Sensor |
Sub Title (in English) |
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Keyword(1) |
depth sensing |
Keyword(2) |
indirect time-of-flight |
Keyword(3) |
multi-tap |
Keyword(4) |
CMOS image sensor |
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1st Author's Name |
Masafumi Tsutsui |
1st Author's Affiliation |
Tower Partners Semiconductor Co. Ltd. (TPSCo) |
2nd Author's Name |
Toshifumi Yokoyama |
2nd Author's Affiliation |
Tower Partners Semiconductor Co. Ltd. (TPSCo) |
3rd Author's Name |
Takahisa Ogawa |
3rd Author's Affiliation |
Tower Partners Semiconductor Co. Ltd. (TPSCo) |
4th Author's Name |
Ikuo Mizuno |
4th Author's Affiliation |
Tower Partners Semiconductor Co. Ltd. (TPSCo) |
5th Author's Name |
Nobuyoshi Takahashi |
5th Author's Affiliation |
Tower Partners Semiconductor Co. Ltd. (TPSCo) |
6th Author's Name |
Cheng Ma |
6th Author's Affiliation |
Gpixel INC (Gpixel INC) |
7th Author's Name |
Fei Wang |
7th Author's Affiliation |
Orbbec Shenzhen (Orbbec Shenzhen) |
8th Author's Name |
Joris Debondt |
8th Author's Affiliation |
Gpixel NV (Gpixel NV) |
9th Author's Name |
Jan Bogaerts |
9th Author's Affiliation |
Gpixel NV (Gpixel NV) |
10th Author's Name |
Xinyang Wang |
10th Author's Affiliation |
Gpixel INC (Gpixel INC) |
11th Author's Name |
Assaf Lahav |
11th Author's Affiliation |
Tower Semiconductor (Tower Semiconductor) |
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Speaker |
Author-1 |
Date Time |
2021-10-21 13:40:00 |
Presentation Time |
20 minutes |
Registration for |
IST |
Paper # |
IST2021-56 |
Volume (vol) |
vol.45 |
Number (no) |
no.30 |
Page |
pp.33-36 |
#Pages |
4 |
Date of Issue |
2021-10-14 (IST) |