| 講演抄録／キーワード |
| 講演名 |
2020-07-01 13:30
Fabrication of Large-Size and High-Uniformity Thin Composite Emission Filter for Lens-Free Fluorescent Imager
○Erus Rustami・Kiyotaka Sasagawa・Thanet Pakpuwadon・Yasumi Ohta・Hironari Takehara・Makito Haruta・Jun Ohta（NAIST） |
| 抄録 |
（和） |
We report a composite emission filter fabrication using laser lift-off (LLO) and plasma etching method. The LLO used a high energy laser to separates filter from its substrate, whereas a SiF6 plasma etched silicon-substrate whereby the filter was deposited beforehand. As a result, spotless composite filters are successfully assembled in a micrometer-sized image sensor by LLO, yet the filter crack issue remains unsolved for large sensors. Conversely, the plasma etching produced large-size and spotless filters with relatively high reproducibility. This large-area etching capability, down to a centimeter range, can then be efficiently used for a multiple lens-free fluorescent device fabrication. |
| （英） |
We report a composite emission filter fabrication using laser lift-off (LLO) and plasma etching method. The LLO used a high energy laser to separates filter from its substrate, whereas a SiF6 plasma etched silicon-substrate whereby the filter was deposited beforehand. As a result, spotless composite filters are successfully assembled in a micrometer-sized image sensor by LLO, yet the filter crack issue remains unsolved for large sensors. Conversely, the plasma etching produced large-size and spotless filters with relatively high reproducibility. This large-area etching capability, down to a centimeter range, can then be efficiently used for a multiple lens-free fluorescent device fabrication. |
| キーワード |
（和） |
Lens-free imaging / Interference filter / Absorption filter / Laser lift-off / Plasma etching / / / |
| （英） |
Lens-free imaging / Interference filter / Absorption filter / Laser lift-off / Plasma etching / / / |
| 文献情報 |
映情学技報, vol. 44, no. 14, IST2020-34, pp. 1-5, 2020年7月. |
| 資料番号 |
IST2020-34 |
| 発行日 |
2020-06-24 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| PDFダウンロード |
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