| Paper Abstract and Keywords |
| Presentation |
2020-01-23 15:15
[Invited Lecture]
Surface Treatment using Atomic Hydrogen for Semiconductor Process
Akira Heya (Univ. of Hyogo) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
To realize flexible displays and sheet computers, we have tried to develop the novel surface treatment, named Atomic Hydrogen Annealing (AHA), using atomic hydrogen generated on a heated metal catalyst for next generation semiconductor processing. In this paper, the improvement of the poly-Ge thin-film-transistors, the adhesion property between barrier film and plastic substrate, and the transparent electrode fabrication (reduction of graphene oxide) by using AHA were investigated. In AHA, the hydrogen passivation of defects in the Ge thin film and the reduction of graphene oxide were achieved at a low temperature. AHA is expected to be a surface treatment for next generation semiconductor processing. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Atomic Hydrogen Annealing (AHA) / Hydrogenation / Reduction / Recombination Energy / Thin-Film Transistors / Plastic substrate / / |
| Reference Info. |
ITE Tech. Rep., vol. 44, no. 1, IDY2020-13, pp. 67-72, Jan. 2020. |
| Paper # |
IDY2020-13 |
| Date of Issue |
2020-01-16 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
|
| Conference Information |
| Committee |
IDY IEICE-EID IEIJ-SSL SID-JC IEE-EDD |
| Conference Date |
2020-01-23 - 2020-01-24 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Tottori Univ |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
|
| Paper Information |
| Registration To |
IDY |
| Conference Code |
2020-01-IDY-EID-SSL-JC-EDD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Surface Treatment using Atomic Hydrogen for Semiconductor Process |
| Sub Title (in English) |
|
| Keyword(1) |
Atomic Hydrogen Annealing (AHA) |
| Keyword(2) |
Hydrogenation |
| Keyword(3) |
Reduction |
| Keyword(4) |
Recombination Energy |
| Keyword(5) |
Thin-Film Transistors |
| Keyword(6) |
Plastic substrate |
| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Akira Heya |
| 1st Author's Affiliation |
University of Hyogo (Univ. of Hyogo) |
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| Speaker |
Author-1 |
| Date Time |
2020-01-23 15:15:00 |
| Presentation Time |
25 minutes |
| Registration for |
IDY |
| Paper # |
IDY2020-13 |
| Volume (vol) |
vol.44 |
| Number (no) |
no.1 |
| Page |
pp.67-72 |
| #Pages |
6 |
| Date of Issue |
2020-01-16 (IDY) |