| Paper Abstract and Keywords |
| Presentation |
2019-12-24 14:05
Ga-Sn-O TFT fabricated on Al2O3 insulating film
Kazuki Hattori, Kenta Tanino, Tokiyoshi Matsuda, Mutsumi Kimura (Ryukoku Univ), Toshiyuki Kawaharamura, Li Liu (Kochi Univ of Tech) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We compared the characteristics of Ga-Sn-O Thin Film Transistors (GTO TFTs) with and without an Al2O3 film by mist Chemical Vapor Deposition (mist CVD) method as an insulator layer.
As a result, high mobility was obtained from the GTO TFT on the Al2O3 insulating film.
This result suggests the possibility of further improvement of GTO TFT characteristics. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
mist Chemical Vapor Deposition (mist CVD) / Al2O3 / Ga-Sn-O (GTO) / Thin-Film Transistor (TFT) / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 43, no. 44, IDY2019-70, pp. 9-12, Dec. 2019. |
| Paper # |
IDY2019-70 |
| Date of Issue |
2019-12-17 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-SDM IEICE-EID IDY |
| Conference Date |
2019-12-24 - 2019-12-24 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
NAIST |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Semiconductor Material Process and Device Meeting |
| Paper Information |
| Registration To |
IDY |
| Conference Code |
2019-12-SDM-EID-IDY |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Ga-Sn-O TFT fabricated on Al2O3 insulating film |
| Sub Title (in English) |
|
| Keyword(1) |
mist Chemical Vapor Deposition (mist CVD) |
| Keyword(2) |
Al2O3 |
| Keyword(3) |
Ga-Sn-O (GTO) |
| Keyword(4) |
Thin-Film Transistor (TFT) |
| Keyword(5) |
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| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Kazuki Hattori |
| 1st Author's Affiliation |
Ryukoku University (Ryukoku Univ) |
| 2nd Author's Name |
Kenta Tanino |
| 2nd Author's Affiliation |
Ryukoku University (Ryukoku Univ) |
| 3rd Author's Name |
Tokiyoshi Matsuda |
| 3rd Author's Affiliation |
Ryukoku University (Ryukoku Univ) |
| 4th Author's Name |
Mutsumi Kimura |
| 4th Author's Affiliation |
Ryukoku University (Ryukoku Univ) |
| 5th Author's Name |
Toshiyuki Kawaharamura |
| 5th Author's Affiliation |
Kochi University of Technology (Kochi Univ of Tech) |
| 6th Author's Name |
Li Liu |
| 6th Author's Affiliation |
Kochi University of Technology (Kochi Univ of Tech) |
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| Speaker |
Author-1 |
| Date Time |
2019-12-24 14:05:00 |
| Presentation Time |
20 minutes |
| Registration for |
IDY |
| Paper # |
IDY2019-70 |
| Volume (vol) |
vol.43 |
| Number (no) |
no.44 |
| Page |
pp.9-12 |
| #Pages |
4 |
| Date of Issue |
2019-12-17 (IDY) |