| Paper Abstract and Keywords |
| Presentation |
2019-09-20 13:15
Digital Pixel Image Sensors with Linear and Wide-Dynamic-Range Output Developed by Pixel-Wise 3-D Integration
Masahide Goto (NHK), Yuki Honda (NHK-ES), Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi (NHK), Takuya Saraya, Masaharu Kobayashi (Univ. of Tokyo), Eiji Higurashi (AIST), Hiroshi Toshiyoshi, Toshiro Hiramoto (Univ. of Tokyo) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We report digital pixel image sensors developed by using pixel-wise three-dimensional (3D) integration technology. Photodiodes (PDs), pulse generation circuits and 16-bit pulse counters are three-dimensionally integrated within every pixel by direct bonding of silicon on insulator (SOI) layers with embedded Au electrodes, which provides in-pixel pulse frequency modulation A/D converters. The developed sensor successfully confirms excellent linearity with a dynamic range of 96 dB, corresponding to a 16-bit value. Pixel-parallel video images with QVGA resolution (320 × 240 pixels) without pixel defects are obtained, demonstrating the feasibility of ultimate image sensors for the next-generation. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
CMOS image sensor / 3D integration / bonding / SOI / photodiode / A/D converter / / |
| Reference Info. |
ITE Tech. Rep., vol. 43, no. 31, IST2019-47, pp. 17-20, Sept. 2019. |
| Paper # |
IST2019-47 |
| Date of Issue |
2019-09-13 (IST) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
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