| Conference Information |
| Committee |
IDY IEICE-EID IEIJ-SSL SID-JC IEE-EDD |
| Conference Date |
2019-01-24 - 2019-01-25 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IDY |
| Conference Code |
2019-01-IDY-EID-SSL-JC-EDD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
ALD low temperature growth and characterization of Al2O3 thin films |
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| 1st Author's Name |
Ryo Yamamoto |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Masahiro Yokokita |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Atsushi Nakamura |
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Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2019-01-24 14:25:00 |
| Presentation Time |
5 minutes |
| Registration for |
IDY |
| Paper # |
IDY2019-9 |
| Volume (vol) |
vol.43 |
| Number (no) |
no.1 |
| Page |
pp.37-40 |
| #Pages |
4 |
| Date of Issue |
2019-01-17 (IDY) |