| Paper Abstract and Keywords |
| Presentation |
2018-12-25 11:45
Device Using Thin Film of GTO by MistCVD Method
Yuta Takishita, Sumio Sugisaki (Ryukoku Univ.), Daichi Koretomo, Yusaku Magari, Mamoru Furuta (KUT), Tokiyoshi Matsuda, Mutsumi Kimura (Ryukoku Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We made devices using Ga-Sn-O(GTO) thin films deposited by mist CVD method. A thin film transistor incorporating GTO prepared by the mist CVD method as a channel layer was fabricated with the AlOx dielectric onto Si substrate. The device was evaluated and confirmed that it was success driven. In addition, switching resistance memory using a GTO thin film prepared by the mist CVD method was created and evaluated. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Oxide semiconductor / GaSnO / thin film transistor / mistCVD / / / / |
| Reference Info. |
ITE Tech. Rep., vol. 42, no. 45, IDY2018-57, pp. 13-16, Dec. 2018. |
| Paper # |
IDY2018-57 |
| Date of Issue |
2018-12-18 (IDY) |
| ISSN |
Print edition: ISSN 1342-6893 Online edition: ISSN 2424-1970 |
| Download PDF |
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| Conference Information |
| Committee |
IEICE-EID IEICE-SDM IDY |
| Conference Date |
2018-12-25 - 2018-12-25 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
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| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
IDY |
| Conference Code |
2018-12-EID-SDM-IDY |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Device Using Thin Film of GTO by MistCVD Method |
| Sub Title (in English) |
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| Keyword(1) |
Oxide semiconductor |
| Keyword(2) |
GaSnO |
| Keyword(3) |
thin film transistor |
| Keyword(4) |
mistCVD |
| Keyword(5) |
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| Keyword(6) |
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| 1st Author's Name |
Yuta Takishita |
| 1st Author's Affiliation |
Ryukoku University (Ryukoku Univ.) |
| 2nd Author's Name |
Sumio Sugisaki |
| 2nd Author's Affiliation |
Ryukoku University (Ryukoku Univ.) |
| 3rd Author's Name |
Daichi Koretomo |
| 3rd Author's Affiliation |
Kochi University of Technology (KUT) |
| 4th Author's Name |
Yusaku Magari |
| 4th Author's Affiliation |
Kochi University of Technology (KUT) |
| 5th Author's Name |
Mamoru Furuta |
| 5th Author's Affiliation |
Kochi University of Technology (KUT) |
| 6th Author's Name |
Tokiyoshi Matsuda |
| 6th Author's Affiliation |
Ryukoku University (Ryukoku Univ.) |
| 7th Author's Name |
Mutsumi Kimura |
| 7th Author's Affiliation |
Ryukoku University (Ryukoku Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2018-12-25 11:45:00 |
| Presentation Time |
15 minutes |
| Registration for |
IDY |
| Paper # |
IDY2018-57 |
| Volume (vol) |
vol.42 |
| Number (no) |
no.45 |
| Page |
pp.13-16 |
| #Pages |
4 |
| Date of Issue |
2018-12-18 (IDY) |