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Paper Abstract and Keywords
Presentation 2018-12-25 14:30
Dependence of thermoelectric properties and structure of Ga-Sn-O thin films on annealing
Yoku Ikeguchi, Tatsuya Aramaki (Ryukoku Univ.), Kenta Umeda, Mutsunori Uenuma (NAIST), Daichi Koretomo, Yusaku Magari, Mamoru Furuta (KUT), Mutsumi Kimura (Ryukoku Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) Ga-Sn-O(GTO) thin films were formed using RF magnetron sputtering, and the influence of deposition pressure and crystal structure on thermoelectric properties was investigated. As a result, thermoelectric properties and electrical characteristics were improved by reducing deposition pressure. In addition, it was confirmed that the device subjected to the annealing treatment at 350 degrees for 1 hour had the best thermoelectric properties and was microcrystalline. It is considered that thermoelectric properties are improved by controlling the composition ratio of GTO.
Keyword (in Japanese) (See Japanese page) 
(in English) Thermoelectric / Ga-Sn-O (GTO) / Oxide Semiconductor / Microcrystal / / / /  
Reference Info. ITE Tech. Rep., vol. 42, no. 45, IDY2018-59, pp. 33-36, Dec. 2018.
Paper # IDY2018-59 
Date of Issue 2018-12-18 (IDY) 
ISSN Print edition: ISSN 1342-6893    Online edition: ISSN 2424-1970
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Conference Information
Committee IEICE-EID IEICE-SDM IDY  
Conference Date 2018-12-25 - 2018-12-25 
Place (in Japanese) (See Japanese page) 
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Paper Information
Registration To IDY 
Conference Code 2018-12-EID-SDM-IDY 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Dependence of thermoelectric properties and structure of Ga-Sn-O thin films on annealing 
Sub Title (in English)  
Keyword(1) Thermoelectric  
Keyword(2) Ga-Sn-O (GTO)  
Keyword(3) Oxide Semiconductor  
Keyword(4) Microcrystal  
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1st Author's Name Yoku Ikeguchi  
1st Author's Affiliation Ryukoku University (Ryukoku Univ.)
2nd Author's Name Tatsuya Aramaki  
2nd Author's Affiliation Ryukoku University (Ryukoku Univ.)
3rd Author's Name Kenta Umeda  
3rd Author's Affiliation Nara Institute of Science and Technology (NAIST)
4th Author's Name Mutsunori Uenuma  
4th Author's Affiliation Nara Institute of Science and Technology (NAIST)
5th Author's Name Daichi Koretomo  
5th Author's Affiliation Kochi University of Technology (KUT)
6th Author's Name Yusaku Magari  
6th Author's Affiliation Kochi University of Technology (KUT)
7th Author's Name Mamoru Furuta  
7th Author's Affiliation Kochi University of Technology (KUT)
8th Author's Name Mutsumi Kimura  
8th Author's Affiliation Ryukoku University (Ryukoku Univ.)
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Speaker Author-1 
Date Time 2018-12-25 14:30:00 
Presentation Time 15 minutes 
Registration for IDY 
Paper # IDY2018-59 
Volume (vol) vol.42 
Number (no) no.45 
Page pp.33-36 
#Pages 4 
Date of Issue 2018-12-18 (IDY) 

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