| Paper Abstract and Keywords |
| Presentation |
2016-08-01 14:30
[Invited Talk]
Novel Pixel Structure with Stacked Deep Photodiode to Achieve High NIR Sensitivity and High MTF
Hiroki Takahashi, Hiroshi Tanaka, Masahiro Oda, Mitsuyoshi Ando, Naoto Niisoe (TPSCo), Shinichi Kawai, Takuya Asano, Mitsugu Yoshita, Tohru Yamada (PSCS) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
Novel pixel structure with Stacked Deep Photodiode (SDP) has been newly developed for both high Near Infra-Red (NIR) sensitivity and high Modulation Transfer Function (MTF). SDP with 5.4µm pixel pitch has achieved Quantum Efficiency (QE) of 30% and MTF of 40% at Nyquist frequency at 850nm wavelength by stacking photodiode completely separated from neighboring pixels. Furthermore, Shifted SDP which can be optimized for oblique incident light has suppressed crosstalk as low as 1.5% at 25 º at 850 nm wavelength. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
NIR / MTF / Stack / Image sensor / Crosstalk / / / |
| Reference Info. |
ITE Tech. Rep. |
| Paper # |
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| Date of Issue |
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| ISSN |
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| Download PDF |
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| Conference Information |
| Committee |
IEICE-ICD IEICE-SDM IST |
| Conference Date |
2016-08-01 - 2016-08-03 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Central Electric Club |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low voltage/low power techniques, novel devices, circuits, and applications |
| Paper Information |
| Registration To |
IEICE-SDM |
| Conference Code |
2016-08-ICD-SDM-IST |
| Language |
English (Japanese title is available) |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Novel Pixel Structure with Stacked Deep Photodiode to Achieve High NIR Sensitivity and High MTF |
| Sub Title (in English) |
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| Keyword(1) |
NIR |
| Keyword(2) |
MTF |
| Keyword(3) |
Stack |
| Keyword(4) |
Image sensor |
| Keyword(5) |
Crosstalk |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Hiroki Takahashi |
| 1st Author's Affiliation |
TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo) |
| 2nd Author's Name |
Hiroshi Tanaka |
| 2nd Author's Affiliation |
TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo) |
| 3rd Author's Name |
Masahiro Oda |
| 3rd Author's Affiliation |
TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo) |
| 4th Author's Name |
Mitsuyoshi Ando |
| 4th Author's Affiliation |
TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo) |
| 5th Author's Name |
Naoto Niisoe |
| 5th Author's Affiliation |
TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo) |
| 6th Author's Name |
Shinichi Kawai |
| 6th Author's Affiliation |
Panasonic Semiconductor Solutions Co., Ltd. (PSCS) |
| 7th Author's Name |
Takuya Asano |
| 7th Author's Affiliation |
Panasonic Semiconductor Solutions Co., Ltd. (PSCS) |
| 8th Author's Name |
Mitsugu Yoshita |
| 8th Author's Affiliation |
Panasonic Semiconductor Solutions Co., Ltd. (PSCS) |
| 9th Author's Name |
Tohru Yamada |
| 9th Author's Affiliation |
Panasonic Semiconductor Solutions Co., Ltd. (PSCS) |
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| Speaker |
Author-1 |
| Date Time |
2016-08-01 14:30:00 |
| Presentation Time |
45 minutes |
| Registration for |
IEICE-SDM |
| Paper # |
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| Volume (vol) |
vol.40 |
| Number (no) |
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| Page |
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