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Paper Abstract and Keywords
Presentation 2011-01-28 14:40
Growth of Magnesium Oxide (MgO) Thin Film with Mist Deposition. -- Challenge to low temperature growth under the atmospheric pressure --
Toshiyuki Kawaharamura (Kochi Univ. Tech.), Hiroyuki Orita, Takahiro Shirahata (TMEIC), Takuto Igawa, Hiroshi Ito (Kyoto Univ.), Akio Yoshida (TMEIC), Shizuo Fujita (Kyoto Univ.), Takashi Hirao (Kochi Univ. Tech.)
Abstract (in Japanese) (See Japanese page) 
(in English) Magnesium oxide (MgO) thin film is useful as the protective film for plasma display and the antireflective film. Therefore, the development of method which can prepare the high quality MgO thin film with low utility cost and environment-friendly is very important. Currently, almost all of the fabrication methods of MgO thin film are the techniques operated with vacuum state. The reason is that the direct growth to the glass substrate is very difficult because the high temperature above 500 °C which is not suitable for glass substrate due to the near glass transition temperatures is necessary to prepare the MgO thin film under the atmospheric pressure. Then, we tried making MgO thin film on the glass substrate with mist deposition. Material oxide thin films such as zinc oxide, gallium oxide, tin oxide, indium oxide, ferric oxide, and so on, can be prepared at atmospheric pressure with mist deposition. In this conference, we report on the conditions and the preparations of MgO thin films.
Keyword (in Japanese) (See Japanese page) 
(in English) mist deposition / magnesium oxide / solution process / atmospheric pressure / low temperature / high quality crystalline / on glass /  
Reference Info. ITE Tech. Rep., vol. 35, no. 4, IDY2011-3, pp. 45-48, Jan. 2011.
Paper # IDY2011-3 
Date of Issue 2011-01-21 (IDY) 
ISSN Print edition: ISSN 1342-6893
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Conference Information
Committee IDY IEICE-EID IEE-EDD IEIJ-OMD  
Conference Date 2011-01-28 - 2011-01-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Kochi University of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Emissive/Non-Emissive Displays 
Paper Information
Registration To IDY 
Conference Code 2011-01-IDY-EID-EDD-OMD-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Growth of Magnesium Oxide (MgO) Thin Film with Mist Deposition. 
Sub Title (in English) Challenge to low temperature growth under the atmospheric pressure 
Keyword(1) mist deposition  
Keyword(2) magnesium oxide  
Keyword(3) solution process  
Keyword(4) atmospheric pressure  
Keyword(5) low temperature  
Keyword(6) high quality crystalline  
Keyword(7) on glass  
Keyword(8)  
1st Author's Name Toshiyuki Kawaharamura  
1st Author's Affiliation Research Institute for Nanodevices, Kochi University of Technology (Kochi Univ. Tech.)
2nd Author's Name Hiroyuki Orita  
2nd Author's Affiliation TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION (TMEIC)
3rd Author's Name Takahiro Shirahata  
3rd Author's Affiliation TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION (TMEIC)
4th Author's Name Takuto Igawa  
4th Author's Affiliation Department of Electronic Engineering and Science, Kyoto University (Kyoto Univ.)
5th Author's Name Hiroshi Ito  
5th Author's Affiliation Department of Electronic Engineering and Science, Kyoto University (Kyoto Univ.)
6th Author's Name Akio Yoshida  
6th Author's Affiliation TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION (TMEIC)
7th Author's Name Shizuo Fujita  
7th Author's Affiliation Department of Electronic Engineering and Science, Kyoto University (Kyoto Univ.)
8th Author's Name Takashi Hirao  
8th Author's Affiliation Research Institute for Nanodevices, Kochi University of Technology (Kochi Univ. Tech.)
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Speaker Author-1 
Date Time 2011-01-28 14:40:00 
Presentation Time 5 minutes 
Registration for IDY 
Paper # IDY2011-3 
Volume (vol) vol.35 
Number (no) no.4 
Page pp.45-48 
#Pages 4 
Date of Issue 2011-01-21 (IDY) 

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